SENSITIVITY TABLE DATA CREATION DEVICE, MASK INSPECTION SYSTEM AND SENSITIVITY TABLE DATA CREATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a sensitivity table data creation device which creates sensitivity data required for creating a sensitivity table giving proper defect detection ratio of a product mask, a mask inspection system and a sensitivity table data creation method.;SOLUTION: The sensitivity table data creation device is selectively provided with; a first sensitivity table data creation part 34A which creates the sensitivity table data on the basis of inspection results of the product mask; and a second sensitivity table data creation part 34 which creates the sensitivity table data on the basis of inspection results of a sensitivity mask. The first sensitivity table data creation part 34A is constituted to acquire defect lists storing information on defects included in each inspection result of the product mask by a defect list acquisition means 343, to synthesize a plurality of defect lists by a defect list synthetic means 344, to select algorithm by an algorithm selection means 346, and to create the sensitivity table data by a sensitivity table data creation means 347 on the basis of the synthesized defect lists and the algorithm.;COPYRIGHT: (C)2010,JPO&INPIT