Being liquid level position adjustment feature of the monocrystal pulling up device which adjusts the position of the liquid level in order to pull up the monocrystal from the molten liquid surface due to the liquid level

摘要

PROBLEM TO BE SOLVED: To provide an exact liquid level position-adjusting mechanism for pulling a single crystal from the surface of a melt in a Czochralski method.;SOLUTION: Image information are obtained by photographing positions and dimensions of mirror images 11B, 11C of a heat shielding body 11 or the distance between the real image 11A and the central position (distances of central points 12A, 12B and 12C) by using a camera arranged at the outside of a furnace while changing them by moving the level of the melt 2 upward and downward. Then, the changes of the positions and the dimensions or the distances between central positions are measured at a plurality of points from the image information, and the position of the level of the melt is adjusted by using, as a base, a standard point in the image information.;COPYRIGHT: (C)2007,JPO&INPIT