The noise removal process which applies the noise removal filter vis-a-vis

摘要

PPROBLEM TO BE SOLVED: To provide an inspection method and a device of a striped irregular defect capable of acquiring high inspection performance without being influenced by the width in a short side direction of the striped irregular defect. PSOLUTION: This inspection method of the striped irregular defect has a noise removal process relative to an input image; a smoothing process for applying a smoothing filter in the direction of the striped irregular defect to be detected relative to a noise removed image; a primary differential process for applying a primary differential filter in the three directions excluding the defect direction relative to a smoothed image; an absolute-value acquiring process for acquiring an absolute value image from a primary differential image; a maximum-value acquiring process relative to each absolute value image in the tree directions; a binarization process relative to a maximum value image; a labeling process relative to a binary image; a domain extraction process for extracting a label A domain; an irregularity value operation process for operating an irregularity value in the label A domain; and a quality determination process for determining the quality of the label A domain based on the irregularity value. This device to which the method is applied is also provided. PCOPYRIGHT: (C)2006,JPO&NCIPI