VACUUM FURNACE AND HEAT TREATMENT DEVICE IN MAGNETIC FIELD USING THE VACUUM FURNACE

摘要

PROBLEM TO BE SOLVED: To provide a vacuum furnace forming a vacuum state during heating by infrared rays while suppressing radiation of heat to outside regardless of the material quality of an outer member and a heat treatment device in the magnetic field using the vacuum furnace.;SOLUTION: The vacuum furnace includes an inner pipe 14 formed of a material permeating infrared rays; an outer pipe 16 forming an outer space S2 with the inner pipe 14; a heating means 18 arranged within the outer space S2 and irradiating infrared rays to a heated target W through the inner pipe 14; a holding means 20 for holding the heated target W in the position enabling heating; and a plurality of radiation shield plates 22 arranged within the outer space S2 to shield a space between the heating means 18 and the outer pipe 16 and reflecting the infrared rays from the heating means 18. The respective radiation shield plates 22 are juxtaposed to the direction orthogonal to the inner face of the outer pipe 16 and are arranged so that the adjacent radiation shield plates 22 leave a clearance in their juxtaposed direction.;COPYRIGHT: (C)2010,JPO&INPIT