You enclose the method of presentation of the central processing unit and the substrate central processing unit and the production mannered null

摘要

PROBLEM TO BE SOLVED: To provide a processor wherein a workpiece to be processed is accommodated in a processing container and the object is subjected to predetermined processing on the basis of a recipe including a plurality of steps, and when the recipe is changed, a total recipe time and a residual recipe time are updated, and an operator can recognize the total recipe time and the residual recipe time always accurately.;SOLUTION: The processor, wherein an object to be processed is accommodated in a processing container 5 and the workpiece is subjected to predetermined processing on the basis of a recipe including a plurality of steps, comprises a memory means 8 for storing times of the steps at least forming the recipe, detection means 7, 9 for detecting changeover of the steps, an arithmetic means 7 for calculating at least a total recipe time as a sum of a time elapsed from a recipe start and a residual recipe time after the current time, and a display means 17 for displaying at least the total recipe time.;COPYRIGHT: (C)2005,JPO&NCIPI