Analog optical interferometric modulator device with static electricity and release behavior

摘要

I will provide an analog optical interferometric modulator device with a release and [challenge] static behavior. A second electrode which is electrically insulated from the first electrode, the first electrode A1 A microelectromechanical systems (MEMS) devices, electrically isolated from the electrode and the second electrode of the first I and a third electrode, which is insulated. The MEMS device, and a moveable reflective element is arranged between the support structure is separated from the second electrode to the first electrode, and the position of the first and second positions. It is in contact with the part of the device when it is in the first position, the reflecting element is not in contact with the part of the device when in the second position. When in the position of the first reflecting element, the adhesive force is generated between the part and the reflective element. Voltage applied to the electrode and the third electrode and the second electrode of the first offset or at least partially reduce the adhesive force. [Selection] Figure