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Method of manufacturing a photonic band-gap vertical cavity surface emitting laser or photonic crystal
Method of manufacturing a photonic band-gap vertical cavity surface emitting laser or photonic crystal
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机译:制造光子带隙垂直腔表面发射激光器或光子晶体的方法
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摘要
The invention relates to fabrication of VCSELs. It provides a method for fabricating a VCSEL that contains a micro/nano-structured mode selective lateral layer, where the micro/nano-structured layer is obtained by well controlled local etching. The invention enables control of the micro/nano-structured layer thickness with very high precision. In particular, the invention relates to a method for fabricating a VCSEL with a micro/nano-structured mode selective layer for controlling the VCSELs transverse electromagnetic modes.
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