At development inside the tank spraying the developer from development

摘要

PROBLEM TO BE SOLVED: To facilitate scum treatment by spraying a developer on foam with the scum attached thereto floating on a surface of the developer stored in a developer reservoir from a plurality of second jet nozzles so as to remove the foam from the developer reservoir and to discharge it and so as to make the foam not be accumulated on a side wall of the developer reservoir.;SOLUTION: When the developer E is sprayed on a substrate K which has been subjected to exposure treatment from a plurality of first jet nozzles in a development vessel 1 so as to dissolve a dry solder resist which has not been cured with an ultraviolet ray from the substrate K and to remove it, the scum S of the dry solder resist is discharged into the developer reservoir 5 arranged on the lower side of the development vessel 1 together with the developer E, and gets to be floating on the surface of the developer E stored in the developer reservoir 5. The developer E is sprayed on the foam 65 with the scum S attached thereto from the plurality of second jet nozzles 63 so as to remove the foam 65 from the developer reservoir 5 and to discharge it.;COPYRIGHT: (C)2007,JPO&INPIT