In the small-sized precise positioner which utilizes the impact force which accompanies the rapidity deformation of the small-sized

摘要

PPROBLEM TO BE SOLVED: To provide a small-sized accurate positioning device using impact force accompanying the rapid deformation of a piezoelectric element, capable of minimizing the influence of frictional force given to the sliding surface of an impact body and efficiently utilizing kinetic energy. PSOLUTION: The small-sized accurate positioning device comprises: an inertia body 21 attached to one side of the piezoelectric element 22; the impact body 23 attached to the other side of the piezoelectric element 22; an impact body moving direction pre-load means attached to a case 27 for giving pre-load to the moving direction of the inertia body 21 and the impact body; guide means 25 and 26 for guiding the inertia body 21 and the impact body 23; and a means for giving a voltage pattern to the piezoelectric element 22 from the outside. The case 27 is fixed to a base 29. PCOPYRIGHT: (C)2008,JPO&INPIT