PROBLEM TO BE SOLVED: To provide a method for more simply measuring each of PFC components in an exhaust gas with high reproducibility using FT-IR.;SOLUTION: This greenhouse effect gas measuring method using an infrared absorbing spectroscope includes a process for selecting a process chemical substance, a process for selecting the quantitative target chemical substance corresponding to the process chemical substance, a process for designating the estimate concentration ranges of the process chemical substance and the quantitative target chemical substance, a process for respectively selecting the libraries corresponding to the estimate concentration range of the process chemical substance and the quantitative target chemical substance and a process for analyzing the data acquired by the infrared absorbing spectral measurement of the gas on the basis of the libraries.;COPYRIGHT: (C)2005,JPO&NCIPI
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