At treatment manner and liquid medicine central processing unit null liquid medicine inside the tank

摘要

PROBLEM TO BE SOLVED: To prevent a chemical atmosphere from leaking out from a chemical treating device submitted for chemical treatment of a semiconductor device or the like to ultimately eliminate pollution due to the chemical atmosphere. ;SOLUTION: In this method of treating a material body with chemical liquid being accumulated in a chemical tank 2, the treatment is made by using a cover 1 covering the upper part of the chemical tank 2, an outside tank 3 in which pure water is caused to flow and the surface of water is divided by a partition connected to the cover 1 and which the pure water overflows along the wall surface toward inside the cover instead of the partition, and an intermediate tank 4 for recovering the overflowed pure water and leading it to the outside through a drainage at a velocity sufficiently higher than the overflow velocity. In the case the material body to be treated is a precision part such as a semiconductor device, this method is particularly suitable.;COPYRIGHT: (C)2000,JPO