With the optical delay unit, the illumination optical device, the exposure device and the exposure device which exposes manner,

摘要

PROBLEM TO BE SOLVED: To eliminate the effect of the deviation of an angle on performance.;SOLUTION: An optical delay element has a concave mirror conjugating the entrance and exit of the optical delay element. The optical delay element divides a luminous flux coming from a coherent light source, and guides the one of the divided luminous flux to an optical delay circuit to return to a light path at which the luminous flux is divided.;COPYRIGHT: (C)2007,JPO&INPIT