Being defective inspection manner of the defective

摘要

PROBLEM TO BE SOLVED: To provide a defect inspection method detecting automatically a defect wherein a foreign matter or the like is intermingled in an object having a plane, especially a defect of film thickness fluctuation on the plane caused by the foreign matter.;SOLUTION: An inspection object is irradiated with inspection light, and reflected light polarized and separated by the inspection object is received, and light components of the received reflected light are subjected to photoelectric conversion, to thereby generate interference data showing the value of each polarized component, and a defect on the surface of the inspection object is detected according to the interference data.;COPYRIGHT: (C)2006,JPO&NCIPI