Being the standard grid production manner which produces the standard grid of the reflected die detection

摘要

PROBLEM TO BE SOLVED: To mass-produce a standard lattice detecting a position accurately by resin moloding.;SOLUTION: Since a reflecting surface angle lattice 32 integrated with a platen 34 can be molded by a resin molding mold 50, the lattice 32 thinned in the shape of a sheet can be mass-produced inexpensively. Since the lattice 32 integrated with the platen 34 is taken out from the mold 50 and can easily be fitted to a linear motor 18, the lattice 32 molded in the shape of a sheet can be fitted exactly, and the lattice 32 molded accurately can be prevented from being fitted in a distorted state.;COPYRIGHT: (C)2006,JPO&NCIPI