Sample chamber, laser ablation devices and laser ablation method

摘要

PROBLEM TO BE SOLVED: To provide a specimen chamber, a laser ablation device, and a laser ablation method, for stabilizing, with respect to the passage of time, the element composition ratio of a pulverized body or gasified matter in a derived carrier gas.;SOLUTION: This specimen chamber 40 comprises an internal space 42 with a specimen S, the object of laser ablation, disposed therein while the carrier gas G flows therein for carrying the pulverized body or gasified matter generated through laser ablation to the specimen S. A plurality of carrier gas inlets 44 and carrier gas outlets 45 are formed in a side-wall surface 43 for demarcating the internal space 42, with the gas inlets 44 positioned on one side A of a position with the specimen S disposed therein while the gas outlets 45 positioned on the other side B of the position with the specimen S disposed therein.;COPYRIGHT: (C)2008,JPO&INPIT