The to cluster capacity control manner of the fluid which is converted and to cluster which is used for this to cluster from capacity control unit null fluid

摘要

PROBLEM TO BE SOLVED: To attain flow control with high precision of a clustered fluid such as a hydrogen fluoride gas to be supplied to a vacuum chamber or the like with respect to a flow rate range of 3-300SCCM by using a compression flow controller.;SOLUTION: The flow control method for the clustered fluid to use the compression flow controller which operates as Q=KP₁ (where K is a constant) a flow rate Q of a gas circulating through an orifice in a state that gas pressure P₁ on an orifice upstream side and gas pressure P₂ on an orifice downstream side are held equal to or below a critical pressure ratio of the gas. In the method, by warming the compression flow controller up to a temperature at 40C or higher or adding a dilution gas to the clustered fluid to make it equal to or lower than partial pressure, association of molecules is dissociated and the clustered fluid put into a single molecular state is later circulated through the orifice.;COPYRIGHT: (C)2006,JPO&NCIPI