The adsorption release device by the work residual magnetism of the permanent-electromagnetic type magnetic chuck and the magnetic chuck of the permanent-electromagnetic type which it adjoins with the polarity which the adsorption

摘要

PROBLEM TO BE SOLVED: To maintain accuracy of a chuck surface, by improving maintainability of a permanent electromagnetic magnet chuck, by easily removing a work from the permanent electromagnetic magnet chuck.;SOLUTION: This permanent electromagnetic magnet chuck 1 has a constant polarity permanent magnet 5, a reversible permanent magnet 7 wound with a main coil 9, and a main magnetic pole member 8 contacting with both the constant polarity permanent magnet 5 and the reversible permanent magnet 7, and is adjacently provided with a plurality of main magnetic pole members 8 in mutually different polarity. An auxiliary magnetic pole member 4 having the chuck surface 4a on the tip is fixedly arranged in the respective main magnetic pole members 8. A frame body 3 is detachably arranged for holding a plurality of auxiliary coils 6 corresponding to the respective auxiliary magnetic pole members 4.;COPYRIGHT: (C)2005,JPO&NCIPI