Star polymers, acid-decomposable resin composition, the resist composition Oyobiji (meth) acrylate compound

摘要

Formula (i)(In formula, R¹ and R^{2 the} hydrogen atom or carbon count displays alkyl group 1 - 4, A acetal structure displays the organic connected basis of 2 values or more which are not included, B displays the organic connected basis of 2 values or more which possess acetal structure or ketaru structure, n1 - n4 display the integer of 1 or more.)So as for the star polymer which possesses the core section which from the chemical compound which is shown is induced, it possesses the acetal structure which is thought, that mass production is easy thermally in stability, it possesses the character which is cleft easily with acid.