Droplet landed observation system and droplet landed observation method

摘要

PROBLEM TO BE SOLVED: To provide a droplet impact observation system capable of observing an impact behavior of a droplet which is delivered from a nozzle hole of a droplet delivery head and impacts a droplet receptor as an image easily recognizable with a simple constitution.;SOLUTION: The droplet impact observation system 10 images such a situation that the droplet 150 delivered from the delivery head 116 impacts the substrate 120 while applying pulse laser beams from a laser beam source 30 as backlight by using a camera 20. The laser beam source 30 applies the pulse laser beams on such a timing imparting a prescribed retardation time to the delivery timing, and a camera 20 images a static image at the instant. The substrate 120 is made movable in the X-direction by a substrate mechanism part 103. The image pickup is performed at every delivery with the timing before and after the impact to the substrate surface 120a, with respect to the droplet 150 delivered periodically.;COPYRIGHT: (C)2006,JPO&NCIPI