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The production mannered null alkaline fusibility resin of semiconductor equipment and the indicating element, and semiconductor equipment and the indicating element which use the positive die photosensitive resin constituent and said positive

机译:使用正型感光性树脂成分及上述正型的半导体装置及指示元件的制造方法,零碱熔性树脂,以及半导体装置及指示元件的制造方法

摘要

PPROBLEM TO BE SOLVED: To provide a photosensitive resin composition having high sensitivity, capable of being patterned without scum and excellent in uniformity in film thickness and to provide a semiconductor device and a display device using the same. PSOLUTION: In the positive-working photosensitive resin composition comprising an alkali-soluble resin (A), a photosensitive diazoquinone compound (B) and two or more mixed solvents (C), the mixed solvents (C) contain a solvent comprising γ-butyrolactone and a propylene glycol monoalkyl ether in an amount of ≥70 wt.% of the total amount of the solvents. PCOPYRIGHT: (C)2005,JPO&NCIPI
机译:<解决的问题:提供一种具有高灵敏度,能够无浮渣地图案化并且膜厚均匀性优异的感光性树脂组合物,并且提供一种半导体装置和使用该组合物的显示装置。

解决方案:在包含碱溶性树脂(A),光敏重氮醌化合物(B)和两种或更多种混合溶剂(C)的正性光敏树脂组合物中,混合溶剂(C)包含以下溶剂: γ-丁内酯和丙二醇单烷基醚的量为溶剂总量的70wt。%。

版权:(C)2005,JPO&NCIPI

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