Being the acousto-Optics acoustooptics device and its operational mannered null acousto-Optics acoustooptics

摘要

Using a laser light source for supplying (151) a light beam (101), the sample inspection system such as a semiconductor wafer (108). Beam (151) is applied to the (104) movable lens acousto-optic devices that respond to RF input signal having an active region, to selectively generate the active region and moving a plurality of lenses. (104), at each of the focal point of each of the movable lens, which is generated, in response to the (151) light beam, operable to generate a flying spot beams movable lens acousto-optic device. In order to produce usable scan data, a photodetector unit having a detector plurality of sections (110) are used, each detector section, input and multiple photodetectors, from the plurality of photodetectors and a multi-stage storage device at least one operable to receive in parallel. Information stored in each storage device is continuously read simultaneously from more than one stage.