Being the stage device which possesses

摘要

PPROBLEM TO BE SOLVED: To stably form a liquid immersion region even if the attitude control of a substrate is performed. PSOLUTION: The device has a mounting surface 34A on which the substrate P is mounted. The device is provided with a transfer device 70 which is opposed to the substrate P, and is moved in a direction with which the mounting surface 34A intersects in response to the pressure of the liquid 1 applied to the substrate P. PCOPYRIGHT: (C)2006,JPO&NCIPI