Fine structure replication for the mother die and the mother die and flexible method of manufacturing the mold

摘要

PROBLEM TO BE SOLVED: To provide a master mold useful for forming a fine structure without the need of complicated fabrication processes or skill in manufacturing, capable of shortening manufacturing processes, and capable of easily forming a complicated fine structure pattern of a projection part or the like of a material excellent in durability.;SOLUTION: The master mold has a pattern support layer and the fine structure pattern, and is so constituted such that the pattern support layer is composed of a first material having a relatively low grinding speed, and the fine structure pattern is formed of a second material layer having a higher grinding speed than the material of the pattern support layer.;COPYRIGHT: (C)2005,JPO&NCIPI