首页> 外国专利> It consists of the repetition unit which is derived from the positive type impression radiation characteristic resin composition for plating modelling thing production and

It consists of the repetition unit which is derived from the positive type impression radiation characteristic resin composition for plating modelling thing production and

机译:它由重复单元组成,该重复单元衍生自用于电镀造型产品生产的正型压痕辐射特性树脂组合物,

摘要

The present invention provides a positive type radiation-sensitive resin composition for producing a product formed by plating, which is capable of forming a product formed by plating of a thick film such as a bump or a wiring with high precision and has excellent sensitivity and resolution, and a process for producing a product formed by plating using the composition. The positive type radiation-sensitive resin composition for producing a product formed by plating comprises (A) a polymer having an acid-dissociative functional group which is dissociated by an acid to generate an acid functional group and (B) a component which generates an acid when irradiated with a radiation. This composition is used also for a positive type radiation-sensitive resin film. The product formed by plating is produced by a process including a step wherein electroplating is carried out with the use of a pattern that is formed from the composition or the resin film on the substrate as a mold.
机译:本发明提供一种用于生产通过电镀形成的产品的正型放射线敏感性树脂组合物,该组合物能够高精度地形成通过电镀诸如凸块或布线的厚膜而形成的产品,并且具有优异的灵敏度和分辨率。以及通过使用该组合物进行镀覆而形成的产品的制造方法。用于生产通过电镀形成的产品的正型放射线敏感性树脂组合物,其包含(A)具有被酸解离以产生酸官能团的酸解离官能团的聚合物和(B)产生酸的组分。当受到辐射时。该组合物也用于正型放射线敏感性树脂膜。通过镀覆形成的产品通过包括以下步骤的工艺来制造,在该步骤中,使用由组合物或基板上的树脂膜形成的图案作为模具来进行电镀。

著录项

  • 公开/公告号JP4370668B2

    专利类型

  • 公开/公告日2009-11-25

    原文格式PDF

  • 申请/专利权人 JSR株式会社;

    申请/专利号JP20000090783

  • 发明设计人 伊藤 淳史;太田 克;岩永 伸一郎;

    申请日2000-03-29

  • 分类号G03F7/039;G03F7/004;G03F7/11;G03F7/38;G03F7/40;

  • 国家 JP

  • 入库时间 2022-08-21 18:57:44

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