Condensation detection device of the hydrogen peroxide gas, and condensate management system of hydrogen peroxide gas

摘要

PROBLEM TO BE SOLVED: To provide a condensation detector of a hydrogen peroxide gas capable of investigating the condensed state of the hydrogen peroxide gas in a fine gas pipeline having a small diameter, and a condensation control system.;SOLUTION: The condensation detector 1 is equipped with a floodlight projection device 4 equipped with a floodlight projection part 9 for emitting a laser beam L in one direction and a light detection device 7 equipped with a light detection part for detecting the laser beam L. The gas pipeline 2 through which the hydrogen peroxide X flows is arranged between the floodlight projection part 9 and the light detection part. The passage wall of the gas pipeline 2 is constituted of a cylindrical pipe 20 made of SUS constituting a light impervious wall part 2a and a cylindrical pipe 21 made of transparent glass constituting a light pervious wall part 2b. The light path of the laser beam L and the cylindrical pipe 21 made of transparent glass are positionally set so as to cross with each other.;COPYRIGHT: (C)2006,JPO&NCIPI