The hard anodic oxide coating and its production manner and target null for hard anodic oxide coating formation

摘要

PROBLEM TO BE SOLVED: To provide a hard film which has hardness higher than that of TiAlN or the conventional (TiAlV)(CN) and has excellent wear resistance, to provide a method of producing the hard film, and to provide a target for forming a hard film which is used therefor.;SOLUTION: The hard film comprises (Ti_a, Al_b, V_c, Si_d, B_f)(C_1-eN_e); wherein, 0.02≤a≤0.5, 0.4b≤0.8, 0.05c, 0≤d≤0.5, 0≤f≤0.1, 0.01≤d+f≤0.5, a+b+c+d+f=1, and 0.5≤e≤1 are satisfied. In this case, a, b, c, d and f are the atomic ratios of Ti, Al, V, Si and B, respectively, and e is the atomic ratio of N.;COPYRIGHT: (C)2004,JPO&NCIPI