Energy analyzer, 2 dimensional indicatory type energy analyzer and photoelectron microscope

摘要

Cheapness, at the same time, the energy analyzer, 2 dimensional indicatory type energy analyzer and the photoelectron microscope which do energy analysis with simple constitution are offered. The energy analyzer (1) from the electron or the ion beam (below, beam) which radiation is done, being the energy analyzer which sorts the beam which possesses pass energy E with fixed open angle from specified thing surface position, takes in the aforementioned beam, the wide angular electronic lens which is made to focus (2) and the wide angular electronic lens (2) is provided in the radiation mouth, at the same time, as the convergent point which the beam which possesses the aforementioned specified energy focuses the 1st aperture where the perforation hole A which is provided in the same position was formed has (3).