By the ZrCu based metal glass alloy make die and its production mannered null spatter modulo

摘要

PROBLEM TO BE SOLVED: To provide a mold that has an ultrafiner and more precise pattern than before, and excellent durability, transfer properties, and the like, and easily achieves a complicated mold shape, for example the mold capable of manufacturing an optical disk that is called the optical disk of a generation after the next and can record 500 GB information.;SOLUTION: The mold for ultrafine pattern transfer is made of a Zr-Cu-based metal glass alloy. In the mold, a nano-scale pattern whose line width or dot diameter is 20 nm or smaller is formed in a state machined by focusing ion beams. The mold is used as a master disk for manufacturing high-density recording media, or a nano-imprint mold, and can superfinely transfer the ultrafine pattern, such as a thermosetting resin film, a crystalline metal film, a metal glass ally film, and a semiconductor film.;COPYRIGHT: (C)2006,JPO&NCIPI