Superconducting magnetic field generating apparatus, a sputtering film forming apparatus using the excitation method, the superconducting magnetic field generator, ferromagnetic detachable jig

摘要

PROBLEM TO BE SOLVED: To provide a superconductivity magnetic field generator in which attachment and detachment are easy, and further which suppresses variation of magnetism and magnetic field distribution of a superconductor and is advantageous to suppressing deterioration of original performance as a superconductivity magnetic field generator, and to provide an excitation method of the generator, sputtering depositing equipment using the superconductivity magnetic field generator, and a ferromagnetic member attachment and detachment holder.;SOLUTION: The superconductivity magnetic field generator is provided with the superconductor 2 which generates magnetic field outside at a temperature which is at most superconductivity transition temperature, a heat insulation vessel 3 with a hold room 30 in which the superconductor 2 is held, a cooling device which cools the superconductor 2, and a ferromagnetic member 6 which rectifies distribution profile of magnetic field generated from the superconductor 2. At least a part (61) of the ferromagnetic member 6 is arranged around the superconductor 2. A magnetic circuit 67 is constituted so that magnetic field is formed in a space in which the superconductor 2 is in contact with the ferromagnetic member 6 (61) arranged at periphery of the superconductor 2.;COPYRIGHT: (C)2005,JPO&NCIPI