A method of manufacturing the same, electrostatic micro-actuator and electrostatic liquid jet recording device and electrostatic liquid jet recording head

摘要

PROBLEM TO BE SOLVED: To prevent the trouble that foreign matters clog and the like by increasing the cross section of a communication path for opening a gap to an atmospheric pressure, and opening the interior of the gap to the atmospheric pressure in a short time without increasing the size of an electrostatic liquid jet recording head.;SOLUTION: An electrode member of an electrode substrate 20 is separated by an electrode separation groove 24 formed by etching to be a counter electrode 23. Simultaneously when the electrode separation groove 24 is formed, the electrode member of a part where a communication groove 27 is to be formed in a succeeding process is removed beforehand by etching. Thereafter, a recess which becomes the gap 26 is formed to an insulating film 25 formed to the entire electrode substrate, and at the same time, the communication groove 27 to be a communication hole 28 is formed by etching. The cross section can be made larger by an amount of the thickness of the electrode member.;COPYRIGHT: (C)2003,JPO