Being the expansion and contraction control unit of the supermagnetostrictor which the minute displacement-controlled device

摘要

PPROBLEM TO BE SOLVED: To provide a micro-displacement controller capable of obtaining precisely a micro displacement, using an expansion controller for a supermagnetostrictive element, by constituting the expansion controller for the supermagnetostrictive element capable of controlling extremely precisely an expansion amount and the displacement accompanied thereto, without providing basically the supermagnetostrictive element in a coil. PSOLUTION: In this micro-displacement controller, the objective micro displacement is attained using the expansion controller for the supermagnetostrictive element constituted to output a displacement in a free end, with expansion and contraction of the supermagnetostrictive element by fixing its one end and by making magnetic force act on the supermagnetostrictive element in the free end of the other end, wherein the rodlike supermagnetostrictive element is arranged between both end plates comprising a nonmagnetic body, wherein magnetic force generating means by electromagnets are arranged in a fixed end side and a free end side of the supermagnetostrictive element, on a coaxial line, and wherein the supermagnetostrictive element is continuously expanded and contracted by controlling current values of the magnetic force generating means to output the displacement to the free end side of the supermagnetostrictive element, and a device and a method are provided also using the micro-displacement controller. PCOPYRIGHT: (C)2006,JPO&NCIPI