The both sides implemental substrate which includes the part where the part is implemented by record media and the survey instrument null both sides of bump record the program and that program of manner, inspection manner and those manners which of the bump

摘要

PPROBLEM TO BE SOLVED: To recognize accurately a bump area as a preceding step of image processing by a subtraction method. PSOLUTION: A both-surface mounting substrate which is an inspection object is measured, and its radiographic image is taken, and a bump simple body image is extracted. Relative position information of the bump simple body image is acquired, and a bump position overlapped with another image is estimated from regularity of bump arrangement. The estimated bump position is corrected by utilizing, for example, Hough transform. The bump area is determined by, for example, matching with a circular pattern having the equal size as the bump on the corrected bump estimated position. PCOPYRIGHT: (C)2005,JPO&NCIPI