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PORTABLE POWER SUPPLY APPARATUS FOR GENERATING MICROWAVE-EXCITED MICROPLASMAS
PORTABLE POWER SUPPLY APPARATUS FOR GENERATING MICROWAVE-EXCITED MICROPLASMAS
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机译:用于产生微波激发的微等离子体的便携式电源装置
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摘要
Provided is a portable power supply apparatus for generating microwave plasma, capable of minimizing a power reflected from a plasma generation apparatus and improving power consumption of the plasma generation apparatus by generating the plasma by using a microwave having a specific frequency, monitoring the power reflected from the plasma generation apparatus after the generation of the plasma, detecting a changed impedance matching condition, and correcting the frequency.
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