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SURFACE ACOUSTIC WAVE RESONATOR, AND SURFACE ACOUSTIC WAVE FILTER AND ANTENNA DUPLEXER IN WHICH THE SURFACE ACOUSTIC WAVE RESONATOR IS USED
SURFACE ACOUSTIC WAVE RESONATOR, AND SURFACE ACOUSTIC WAVE FILTER AND ANTENNA DUPLEXER IN WHICH THE SURFACE ACOUSTIC WAVE RESONATOR IS USED
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机译:使用表面声波谐振器的表面声波谐振器,以及使用表面声波谐振器的表面声波滤波器和天线双工器
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摘要
The present invention provides a surface acoustic wave resonator capable of improving the leak of a surface acoustic wave in the transverse direction and reducing the spurious and having superior characteristics. In a surface acoustic wave filter according to the present invention, an interdigital transducer electrode and reflector electrodes are formed on a piezoelectric substrate, and a SiO2 thin film is further formed thereon. The interdigital transducer electrode includes a bus-bar electrode region, a dummy electrode region and a finger overlap region, and the SiO2 thin film is removed from upper sections of the bus-bar electrode regions in the interdigital transducer electrode.
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