首页>
外国专利>
Titanium oxide photocatalyst thin film and production method of titanium oxide photocatalyst thin film
Titanium oxide photocatalyst thin film and production method of titanium oxide photocatalyst thin film
展开▼
机译:氧化钛光催化剂薄膜及氧化钛光催化剂薄膜的制造方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
The present invention provides a titanium oxide photocatalytic thin film having a surface layer containing silicon oxide and titanium oxide and a production method for producing a titanium oxide photocatalytic thin film having a surface layer containing silicon oxide and titanium oxide and comprising a step of radiating excimer beam to the titanium oxide thin film while heating substrate on which the titanium oxide thin film is disposed in vacuum or gas atmosphere in the presence of a silicon-including compound.
展开▼