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Method for consistent updates to automated process control (APC) models with partitioning along multiple components
Method for consistent updates to automated process control (APC) models with partitioning along multiple components
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机译:沿多个组件进行分区以对自动过程控制(APC)模型进行一致更新的方法
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摘要
Methods for consistent updates to APC models with partitioning along multiple components are generally described. In one example, a method includes acquiring measurement data from one or more semiconductor wafers of a processed first lot, the data having a plurality of contexts, applying a model having parameters with partitioning along the contexts to the measurement data; and applying a constraint on a subset of the model parameters such that the subset remains centered around zero to provide consistent updates for automated process control of lots processed after the first lot.
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