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Piezoelectric element containing perovskite type oxide, and liquid jet head and ultrasonic motor using the piezoelectric element
Piezoelectric element containing perovskite type oxide, and liquid jet head and ultrasonic motor using the piezoelectric element
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机译:包含钙钛矿型氧化物的压电元件,使用该压电元件的液体喷射头和超声波马达
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摘要
There is disclosed a piezoelectric element having, on a substrate, a piezoelectric body and a pair of electrodes which come in contact with the piezoelectric body, wherein the piezoelectric body consists of a perovskite type oxide represented by the following formula (1):(Bi,Ba)(M,Ti)O3 (1)in which M is an atom of one element selected from the group consisting of Mn, Cr, Cu, Sc, In, Ga, Yb, Al, Mg, Zn, Co, Zr, Sn, Nb, Ta and W, or a combination of the atoms of the plurality of elements.
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机译:公开了一种压电元件,其在基板上具有压电体和与该压电体接触的一对电极,其中该压电体由下式(1)表示的钙钛矿型氧化物组成:<?in-line-formulae description =“在线表达式” end =“ lead”?>(Bi,Ba)(M,Ti)O 3 Sub>(1)<?in-line-公式description =“ In-line Formulae” end =“ tail”?>其中M是选自Mn,Cr,Cu,Sc,In,Ga,Yb,Al,Mg,Zn,Co,Zr,Sn,Nb,Ta和W或它们的组合中的一种元素的原子多个元素的原子。
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