Two-dimensional lattice calibrating device, two-dimensional lattice calibrating method, two-dimensional lattice calibrating program and recording medium

摘要

A two-dimensional lattice calibrating device includes: a measuring unit that measures respective positions of marks for each of a plurality of measurement dispositions; a simultaneous-equations generating unit that generates simultaneous equations for acquiring deviations of the plurality of marks using a coordinate relational equation and a least-squares conditional equation that sets least-squares lines that minimize the deviation of actual position of the marks based on measurement values as coordinate axes of artifact coordinates; and a simultaneous-equations calculating unit that solves the derived simultaneous equations.