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Full spectrum adaptive filtering (FSAF) for low open area endpoint detection
Full spectrum adaptive filtering (FSAF) for low open area endpoint detection
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机译:全光谱自适应滤波(FSAF)用于低空域端点检测
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摘要
A method for precise endpoint detection during etch processing of a substrate based on adaptive filtering of the optical emission spectrum (OES) data, even in low open area etching, is provided. Endpoint detection performed in this manner offers the benefits of increased signal-to-noise ratio and decreased computation costs and delay when compared to conventional endpoint detection techniques.
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