Method and apparatus using embedded sensor in a piezoelectric micro-actuator in a hard disk drive

摘要

A piezoelectric sensor-actuator, including a piezoelectric sensor bonded through non-conductive adhesive to a piezoelectric actuator to determine the pressure and/or temperature near the coupled slider. The piezoelectric actuator contributes to slider positioning. The piezoelectric sensor determines the experienced stress-strain. The hard disk drive uses the piezoelectric sensor-actuator creates a stress-strain measurement, a sensor spectrum, deriving the temperature estimate and/or the pressure estimate from said sensor spectrum, and operating at least one positioning control group member based upon the temperature estimate and/or pressure estimate. The micro-actuator containing at least one of the piezoelectric sensor-actuators, flexure finger, head gimbal assembly, head stack assembly, an actuator assembly, an embedded circuit, and the hard disk drive. The invention includes manufacturing methods and the piezoelectric sensor-actuator, the micro-actuator, the head gimbal assembly, the actuator assembly, the head stack assembly, the embedded circuit, and the hard disk drive as products.