Monolithic displacement measuring interferometer with spatially separated but substantially equivalent optical pathways and optional dual beam outputs

摘要

An interferometer and corresponding system are provided having several aspects. In a first aspect, there is provided an interferometer adapted to receive separate first and second beams f₁ and f₂ therein, the interferometer comprising substantially equivalent and separate first and second optical pathways for the first and second beams f₁ and f₂. In a second aspect, there is provided an interferometer adapted to receive as separate inputs therein first and second beams f₁ and f₂, where such beams are not mixed or combined until just prior to being output by the interferometer. In a third aspect, an interferometer is provided having one or more beam blockers for intercepting extraneous or undesired light, and keeping such light from contaminating or interfering with separate beams f₁ and f₂.