首页>
外国专利>
Algorithm for real-time process control of electro-polishing
Algorithm for real-time process control of electro-polishing
展开▼
机译:电抛光实时过程控制算法
展开▼
页面导航
摘要
著录项
相似文献
摘要
Method and apparatus for process control of electro-processes. The method includes electro-processing a wafer by the application of two or more biases and determining an amount of charge removed as a result of each bias, separately. In one embodiment, an endpoint is determined for each bias when the amount of charge removed for a bias substantially equals a respective target charge calculated for the bias.
展开▼