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Enhanced Electrically Adjustable Fabry-Perot Interferometer, Intermediate, Electrode Arrangement, and Method for Producing Fabry-Perot Electrically Adjustable Interferometer
Enhanced Electrically Adjustable Fabry-Perot Interferometer, Intermediate, Electrode Arrangement, and Method for Producing Fabry-Perot Electrically Adjustable Interferometer
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机译:增强型电可调法布里-珀罗干涉仪,中级,电极布置以及生产法布里-珀罗电可调式干涉仪的方法
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摘要
Electrically tunable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. Producing interferometers with prior art processes includes costly and complicated production phases. Therefore, it has not been possible to apply interferometers in consumer mass products. According to the present solution, the Fabry-Perot cavity is made by removing a sacrificial layer (112) which has been polymer material. A mirror layer (113, 117-120) which is produced above the sacrificial layer can be made with atomic layer deposition technology, for example. According to a preferable embodiment, electrodes (106b, 115b) of the mirror structures are formed by using sputtering or evaporation. With the present solution it is possible to avoid the above mentioned problems related with prior art.
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