DEVICE FOR GENERATING EXTREMELY ULTRAVIOLET RADIATION FROM AN ENERGY BUNDLE-GENERATED PLASMA WITH HIGH CONVERSION EFFICIENCY AND MINIMAL POLLUTION.

摘要

The arrangement has a target supply device (1) with a gas condensation chamber (12), and a target material supplied as a mixture of solid metallic particles (14) e.g. lithium and tin, in liquefaction carrier gas e.g. argon, of an injection unit (13). The injection unit has a target nozzle (133) for the production of defined droplet size and drop sequence. Controllable units with pressure modulator to produce a temporally controlled consequence of drop, where the units are triggered with the pulse frequency of the energy beam.