METHOD FOR DETERMINATION OF REFRACTION COEFFICIENTS AND THICKNESSES OF LAYERS OF TRANSPARENT PARALLEL-SIDED STRUCTURE WITH ARBITRARY NUMBER OF LAYERS

摘要

Method for determination of refraction coefficients and thicknesses and thicknesses of layers of transparent parallel side structure that includes measurement of spectral dependence of coefficient of reflection of lightin low dispersion region of spectrum at normal incidence of light to surface of structure and determination of refraction coefficients and thicknesses and of layers of structure under investigation in which one determines parameters,, relates to refraction coefficients and thicknesses of layers through gradual narrowing ranges of possible values of those parameters due to selection of valuesand, at which number of extremes of functions proposed determined on basis of experimental reflection spectrum is minimal.