The invention relates to object surface inspection devices. The laser nanoprofilometer consists of the body. On the surface there is a laser and optically connected between them, a deflector plate, a light divider, a focusing microscope objective, two references and measuring signal light-detecting devices and an object stage. The device comprises a control signal generator, electrically connected with a deflector plate and a control and processing data unit, electrically connected with the control signal generator and light-detecting devices. Between the laser and the deflector plate there is an optically neutral light attenuator and a biprism laser beam splitter into two paraxial beams. Between the lght divider and the references and measuring signal light-detecting devices there are two additional object glasses optically connected with them, and the light-detecting devices are made as charge-coupled device matrices. The deflector plate is made as a double-coordinate deflector with opportunity of an independent laser beam deflection by each coordinates. The direction of scanning x and y make 45° with the splitting direction. The invention provides for high separating power, reliability enhancement and device efficiency.
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