CVD DIAMOND-COATED COMPOSITE SUBSTRATE CONTAINING A CARBIDE-FORMING MATERIAL AND CERAMIC PHASES AND METHOD FOR MAKING SAME

摘要

THE PRESENT INVENTION RELATES TO A COMPOSITE MATERIAL AND THE METHOD OF MAKING SAME, WHICH COMPRISES A CVD DIAMOND COATING APPLIED TO A COMPOSITE SUBSTRATE OF CERAMIC MATERIAL AND AN UNREACTED CARBIDE-FORMING MATERIAL OF VARIOUS CONFIGURATIONS AND FOR A VARIETY OF APPLICATIONS. ONE EXAMPLE OF THE COMPOSITE MATERIAL IS A COMPOSITE OF SIC AND FREE SILICON METAL KNOWN AS REACTION-BONDED SILICON CARBIDE. SEVERAL EXAMPLES OF APPLICATIONS OF THE INVENTION INCLUDE: 1) HEADS OR DISKS FOR CONDITIONING POLISHING PADS, INCLUDING PADS USED IN CHEMICAL-MECHANICAL-PLANARIZATION, 2) CUTTING AND DRESSING TOOL INSERTS AND TIPS, 3) HEAT SPREADERS FOR ELECTRONIC DEVICES, AND 4) WEAR COMPONENTS INCLUDING MECHANICAL SEALS AND PUMP SEALS. FIG. 3