DEFORMATION MEASURING APPARATUS, EXPOSURE APPARATUS, JIG FOR DEFORMATION MEASURING APPARATUS, POSITION MEASURING METHOD AND DEVICE MANUFACTURING METHOD

摘要

A base member (51) is provided with a piezoelectric element (52).  A deformation measuring apparatus has a regulating apparatus (S) which regulates transmission of deformation in a second direction (x) which intersects with a first direction (y), among deformation transmitted to the piezoelectric element through the base member.