Method and device for gas purifying by combined use of plasma treatment and filtration

摘要

A gas purifying system (1) for purifying object gas, comprises a filter (5) disposed in the discharge reaction device having a structure for trapping particular matter contained in the object gas during a time when the object gas passes through the filter; and a discharge generation device operatively connected to the discharge reaction device for causing electric field inside the discharge reaction device and generating discharge plasma. A gas purifying system for purifying an object gas, comprises: (a) a gas flow line through which the object gas to be purified flows from an object gas generator; (b) a discharge reaction device (4) provided on a way of the gas flow line; (c) a filter disposed in the discharge reaction device having a structure for trapping particular matter contained in the object gas during a time when the object gas passes through the filter; and (d) a discharge generation device operatively connected to the discharge reaction device for causing electric field inside the discharge reaction device and generating discharge plasma. Independent claims are also included for: (a) a gas purifying method of purifying an object gas, comprising arranging a discharge reaction device, provided with a filter, on a way of a gas flowline through which the object gas including particular matter to be treated flows; trapping particular matter in the object gas by the filter; and generating an electric field in an area in which the filter is disposed; and generating a discharge plasma in the discharge reaction device; and (b) a discharge reaction apparatus comprising a cylindrical discharge reaction device; a filter disposed inside the discharge reaction device; and a high voltage pole side and an earth pole side between which the filter is arranged.