Bolometric detection method of (sub-)millimeter waves using an antenna coupled bolometer having a cavity

摘要

The device has a number of bolometers with a receiving antenna (22), a resistive load (26), thermometric unit (24) and an optical cavity (28) surrounded by a part of the bolometer. The antenna (22) is arranged above the cavity. The thickness of the cavity is less than lambda /(4n), where n is an optical index of the part of the bolometer, and lambda is average wavelength of the electromagnetic waves which are to be detected. An independent claim is also included for a manufacturing process of a bolometer detection device.